TMA is the most widely used aluminum precursor for MOVPE, CVD, or ALD processes for Si semiconductor, LED, III-V solar, Laser diode and other compound semiconductor devices.
- High-k
- Metal Oxides
- US
- Korea
- China
- Taiwan
- Japan
- Europe
- Semiconductors
- Logic
- Memory (DRAM, NAND, 3D NAND)